Foshan Zhemei Vacuum Technology Co., Ltd

Product Features:
➢ Diversified design, which can meet the experimental applications of various enterprise research laboratories and university research laboratories

Device parameters
Device model SCP-300 SCP-400 SCP-500
Equipment specifications ☐300×300×400 Ø300×400 ☐400×400×450 Ø400×450 ☐500×500×500 Ø500×500
Type of film Conductive elemental metal films, dielectric films, optical films, ceramic oxide films, hard films, non-metallic films
Power supply type DC power supply, intermediate frequency power supply, RF power supply, bias power supply
Sample stage It is equipped with a 6-inch sample rotation stage, adjustable within 1rpm to 30rpm, and can be designed to add bias or lifting function (can be customized according to customer products).
Cathode target Standard with 1~4 Ø2" cathodes, 1~2 3-inch cathodes, 2-, 3-, 4-, 5-, 6-inch cathodes, additional instructions for strong magnetic targets
Vacuum chamber structure Vertical front door/bell structure (double jacket or sink cooling), top or rear exhaust system and water cooling system
Vacuum system Rotary vane pump, roots pump, molecular pump (or optional: molecular pump, cryogenic pump, cryogenic system, etc.);
Heating system The normal temperature can be adjusted and controlled to 600°C, the accuracy is ±1°C, and the stainless steel heating tube is heated
Inflatable system Mass flow controller (1~3 channels) 100sccm/200sccm or customized
Ultimate vacuum Better than 6×10-5pa (no load, clean, cold).
Holding pressure 1h≤0.5pa
Control mode Manual, semi-automatic, fully automatic/touch screen, PLC, industrial control
remark Equipment specifications can be customized according to customer products and special process requirements